ÓñÐßÔ°

Quartz ÓñÐßÔ°

Quartz Solids

Solid dependability

ÓñÐßÔ° produces high-purity clear fused and opaque quartz ingots that deliver high-performance for advanced wafer processing. Inherent part-per-million and part-per-billion trace element levels allow chip makers to achieve leading edge performance and yield. Specially processed to possess low hydroxyl (¨COH) levels, ÓñÐßÔ° quartz ingots are an excellent solution for elevated temperature applications.

Key Features

  • Exceptionally high purity offers an ultraclean environment during front-end semiconductor wafer processing
  • Material homogeneity delivers uniform and predictable performance
  • Low hydroxyl achieves high viscosity for elevated temperature applications
  • ¡°Copy Exactly¡± processes deliver identical output and consistent yield
  • Wide range of sizes offers flexibility for fabrication of various shapes
  • Global authorized network of fabricators precisely transform ÓñÐßÔ° quartz ingots into finished products

Potential Applications

  • Semiconductor wafer processing equipment for etch, diffusion, deposition and tanks
  • LED wafer processing
  • Solar wafer processing
  • Optical

ÓñÐßÔ° quartz ingots are produced in several high-purity grades to suit various applications. Multiple form factors are available ranging from hollow cylinders to large solid ingots allowing for ultimate flexibility during component fabrication. Ingot materials are available through a worldwide network.

Product Grades

Grades Description Applications
124?
Standard high-purity quartz
Semiconductor, LED, solar wafer processing and optical
144?
Low Al + low alkali quartz
Premium semiconductor wafer processing
012?/012AI
Synthetic ultra-high purity quartz; low hydroxyl
Advanced node semiconductor wafer processing and optical
i21?
Premium visual quality; available in various purities
Semiconductor wafer processing and optical
quartz solids

Maximum Trace Impurities (Unit: wppm)

ÓñÐßÔ° Al Ca Cu Fe Li Mg Mn K Na Ti Zr
124
19
2.0
0.10
0.8
2.0
1.0
0.24
3.0
2.5
2.0
3.5
144
10
2.0
0.009
0.8
0.4
1.0
0.24
0.4
0.5
2.0
3.5
012
0.5
0.15
0.05
0.2
0.15
0.1
0.05
0.2
0.2
0.16
0.3
012AI
9~14*
0.15
0.05
0.2
0.15
0.1
0.05
0.2
0.2
0.16
0.3
i21-24
19
2.0
0.10
0.8
2.0
1.0
0.24
3.0
2.5
2.0
3.5
i21-44
10
2.0
0.009
0.8
0.4
1.0
0.24
0.4
0.5
2.0
3.5

* Note: Min= 9 ppm, Max= 14 ppm

The information provided in these charts is for informational purposes only. It is not a product or material recommendation and it is shared with you on the express condition that you will use your own expertise and professional judgment in applying any information to a specific use case or need. This is general information only, the validity of which may be affected by individual factors that are unknown to ÓñÐßÔ°. It is the responsibility of those using this information to ensure appropriate interpretation and application is undertaken with regards to any specific situation.

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Quartz Solids

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Japan

+81 3 6721 1910